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PSECE
21 - 23 Jun 2017
SMX Convention Center, Manila, Philippines

Find us at Booth 255!

Photonics
31 Jul - 4 Aug 2017
Sands Expo & Convention, Singapore
Find us at Booth A15!

Click for more information!

Committed to Service

Vacuum Valves

 
The KF, ISO-F, ISO-K, ASA and JIS flanged 11000 Series Standard Cycle Gate Valves are designed for high vacuum applications. These valves provide valving for cryopumps, turbo pumps, ion pumps and other applications requiring clean, low outgassing valves.
 
The HVA 16000 Series Shielded Gate Valve features a travelling shield that moves with the gate to protect it from debris. These valves are used in extremely aggressive applications where reoccuring down time is not an option.
 
The 21200 Series Million Cycle Gate Valves are designed for high vacuum applications specifically when pressure ranges approximate 1 x 10-9 mbar and bakeout temperatures do not exceed 150°C. There are no mechanical locks inside vacuum, which is extremely beneficial for semiconductor and sensitive processes requiring vibration-free operation.
 
The 28200 Series Direct Drive Rectangular Valves offer one of the smallest interior surface areas in the vacuum valve industry. In the open position, the seal plate O-ring is completely out of sight preventing any particulate or media flow to accumulate on the sealing surface. In the closed position the one piece solid block design prevents any material buildup on the back side of the valve mechanism dramatically reducing service and maintenance requirements.
 
The HVA 78000 Series View Port Gate Valve features an exchangeable borosilicate window ideal for single laser applications, mass spectroscopy, nonlinear optics, nanoscale microscopy, single photon ionization and short pulse spectroscopy.
 
The 88200 Series Direct Drive Rectangular Valves offer one of the smallest interior surface areas in the vacuum valve industry. In the open position, the seal plate O-ring is completely out of sight preventing any particulate or media flow to accumulate on the sealing surface. In the closed position the one piece solid block design prevents any material buildup on the back side of the valve mechanism dramatically reducing service and maintenance requirements.
 
OEM Integration. All HVA products are engineered to be compatible with the latest Semiconductor tools and offer a retrofit solution for upgrading previous generation tools. Whether it is an etch, CVD, PVD cluster tool or implanter, HVA offers easy OEM Integration for all your MESC applications.