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Defects Inspection Systems

 

The latest technology in defect inspection for glass wafers, rough film on wafers, disk substrates/media. Designed for transparent, thin substrate, rough surfaces.

MULTI-MODE DEFECT INSPECTION SOLUTION

The ZetaScan series are fully automated 300mm capable defect inspection tools that can address a variety of substrates such as opaque and transparent wafers as well as touch panels, rough ground, polished or unpolished substrates. Based on Zeta’s revolutionary multi-mode approach to inspection, the ZetaScan series defect inspectors provide high defect sensitivity at high throughput.