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Photonics
31 Jul - 4 Aug 2017
Sands Expo & Convention, Singapore
Find us at Booth A15!

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RF Power Supplies

 
The versatile Apex® family of RF generators and power-delivery systems utilizes sophisticated RF-conversion technology to offer enhanced product and process reliability, in a modular design suitable for chamber mounting. The Apex platform delivers superb performance in plasma-based thin film processes for semiconductor, flat panel display, or data storage manufacturing.