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Diaphragm pumps - the Ideal Backing Pumps for Pfeiffer Vacuum Turbopumps.

Dry and oil-free diaphragm pumps with a pumping speed of 6 to 160 l/min. They are ideally suitable for being used as a backing pump for Pfeiffer Vacuum turbopumps and for integration into compact systems.


Absolutely dry and oil-free vacuum
Long diaphragm service life
Low noise and vibration levels
High reliable
Maintenance-friendly through easy diaphragm and valve replacement
Can be used anywhere in the world due to multi-voltage motors or DC drives



Backing pump for many Pfeiffer Vacuum turbopumps
For systems and pumping stations
In laboratories
Research & Development
Leak detection
All areas where an oil-free and dry vacuum and uncontaminated pumping of gases is required