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Semicon SEA
8 - 10 May 2018
Find us at Booth 125!

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The versatile Apex® family of RF generators and power-delivery systems utilizes sophisticated RF-conversion technology to offer enhanced product and process reliability, in a modular design suitable for chamber mounting. The Apex platform delivers superb performance in plasma-based thin film processes for semiconductor, flat panel display, or data storage manufacturing.



  • Higher power density
  • Improved process flexibility
  • Increased yield
  • Lower CoO
  • Simplified process tool integration
  • Flexible communications


  • Streamlined design
  • On-board chamber mount, on-tool frame mount, rack mount, and shoebox options
  • Wideband control loops and optional, high repetition-rate pulsing
  • Industry-leading arc management
  • Regulatory compliant