Advanced Energy's Pinnacle Series DC Power Supplies store less than 1mJ per 1kW of output for the shortest arc recovery time in the industry. With a hard-arc detection time of 1 to 3 ?s, they are approximately ten times faster than competing units.
The versatile Apex® family of RF generators and power-delivery systems utilizes sophisticated RF-conversion technology to offer enhanced product and process reliability, in a modular design suitable for chamber mounting. The Apex platform delivers superb performance in plasma-based thin film processes for semiconductor, flat panel display, or data storage manufacturing.