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NEBULA SERIES: Semi/ Fully Automated Cluster
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Angstrom Engineering

AMOD Physical Vapour Deposition Platform

This PVD platform begins to allow for larger chamber throw distances, and the ability to accommodate more process enhancements.

With its 500mm x 500mm baseplate, your Amod physical vapour deposition platform can accommodate up to 10 sources and wide variety of PVD processes. Your research goals, production demands, and/or application end-goals will inform how to outfit your Amod.

NOT TOO BIG, NOT TOO SMALL…IT’S JUST RIGHT

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Description

DEPOSITION SOURCE OPTIONS

Sputtering 
RF, DC, pulsed DC, HIPIMS, and reactive. Circular, linear & cylindrical cathodes are available.

Thermal Evaporation 
With the Amod PVD platform, you can utilize a wide range of boats, filaments & crucible heaters. Auto-tuning ensures precise rate control.

Electron Beam Evaporation 
A wide range of source power and power supply options are available. Programmable sweep controller with recipe storage is controlled through Aeres software platform. A torque sensing crucible indexer detects pocket jams. There is room for multiple e-beam sources in the Amod chamber.

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Brand

Angstrom Engineering
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