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Home Research Engineering Mass Flow Controllers (MFCs) Analog MFCs – Aera
Digital MFCs – Aera
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Point-of-Use 3500
Hitachi Metals

Analog MFCs – Aera

Precise, reliable, metal-sealed design

Suitable for a variety of applications, including CVD, PVD, diffusion, and etch, Aera Transformer  digital mass flow controllers (MFCs) and mass flow meters (MFMs) will transform your process, providing superior flexibility and efficiency for improved yield, higher productivity, and lower cost of ownership. Advanced sensor and valve technology, field-proven platform components, and high-speed, digital circuitry deliver very precise gas flow control. With superior reliability and outstanding response, accuracy, and repeatability, this versatile product line offers both single-gas and multi-gas, multi-range MFCs to suit your priorities for value and functionality.

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Categories: Mass Flow Controllers (MFCs), Mass Flow Controllers (MFCs)
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Description

Features

  • Multi-gas, multi-range selection*
  • Fast response
  • All-metal seals
  • Field programmable*
  • Wide range of gas selection without recalibration*
  • DeviceNet, RS-485, or analog control
  • Multiple alarm and diagnostic capabilities
  • RoHS compliant

* Available in multi-gas, multi-range Transformer MFCs

Additional information
Brand

Hitachi Metals

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