Process module options:
- Substrate cleaning and preparation using plasma or ion beam sources
- Multiple vacuum deposition modules are available for PVD, CVD, ALD, & others
- Substrate and mask storage cassettes can accommodate 25 or more sample trays as needed
- Distribution modules using SCARA robots are sized to meet your requirements
- Glovebox environments can be integrated to one or more modules
Substrate size/ throughput:
We have built modules that accommodate standard semiconductor wafer form factors, as well as typical display glass, including modules for Gen. 2 (360 mm x 465 mm) and larger.
Throughput depends on process duration and complexity. However, the AERES software platform optimizes layer to layer transitions to reduce overall process time.