Digital MFCs – SAM
From F to FX: Passing along the tradition
SAM uses a waveform diaphragm made of a Ni-Co alloy (YET 101), developed by Hitachi Metals, which also proves that we are a manufacturer of high class metal materials. By employing this excellent diaphragm in the flow rate control valve, the key component in a mass flow controller, we incorporate a simple valve design that does not use any sliding sections and reduces the occurrence of particulate contamination. With a high corrosion resistance and stable control performance, we leave the competition behind and our customers satisfied.